BS ISO 19463:2018 Microbeam analysis. Electron probe microanalyser (EPMA). Guidelines for performing quality assurance procedures

Scanning electron microscopes
Microscopes
Calibration
Electron microscopes
Accuracy
Optical instruments
Optical phenomena
Control samples
Electron optics
Electron beams
Magnification

Link: BS ISO 19463:2018 Microbeam analysis. Electron probe microanalyser (EPMA). Guidelines for performing quality assurance procedures
Source: BSI Standards